Sale of ZEISS iTrap

has been acquired by Type: Divestiture

OBERKOCHEN, Germany / NACKA, Sweden | Semiconductor Manufacturing Technology

Atlas Copco Group, a Sweden-based provider of industrial productivity solutions has acquired iTrap® mass spectrometry technology from ZEISS. The business will become part of the Semiconductor Chamber Solutions Division in Atlas Copco‘s Business Area Vacuum Technique.

ZEISS has developed the ion trap mass spectrometer iTrap, a technology for highly sensitive, real time gas analysis. The technology is used for process analytics and advanced process control in the semiconductor market. iTrap can analyze important chemical processes in vacuum chambers of semiconductor manufacturing equipment and other applications giving important insights into process dynamics and can also enable process control. That is the first external sale of a ZEISS venture. The innovation will benefit from better market synergies that are available outside of ZEISS.

Atlas Copco will integrate iTrap in the Edwards business to synergize with other vacuum technology solutions of the worldwide market leader. At Edwards, the technology will benefit from a worldwide sales and service network as well as from innovation and application centers close to all relevant major customer sites worldwide.

The asset deal comprises the sale of the technology including intellectual properties and the transfer of key employees. Both parties have agreed not to disclose the purchase price or other details of the agreement. Completion of the transaction was on 3 August 2020.


Gerrit Schulte
, Head of ZEISS Ventures and Daniel Ritter, Head of ZEISS M&A:

“We selected Acuity as advisors in this process because of their semiconductor expertise and strong network of industry contacts. Both proved essential in crafting the right selling messages, identifying the optimal partner and ultimately structuring a transaction which aligned all parties’ interests.”

Oliver Markl, Managing Partner at Acuity Advisors:

“The iTrap is another example of the ZEISS culture of engineering excellence. Starting with an idea and from scratch eight years ago, the iTrap team developed and built a technology which allows its customers to understand for the first time the chemical processes in the vacuum chamber in real time – an advance which in turn will unlock material yield improvements and create substantial value in the production process. It was exciting to support the ZEISS team in finding the ideal strategic partner. Edwards is perfectly positioned to help iTrap in its next phase of growth and we wish them much success.”

Matthew Byatt, Supporting Partner at Acuity Advisors:

“Being the most successful mid-market advisor in the semiconductor sector enabled us to add real value in this project. We demonstrated our comprehensive understanding of the industry, an ability to grasp complex engineering concepts and we accessed our international network to find exactly the right buyer in Edwards.”

Oliver Markl, Managing Partner, Acuity

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quote We selected Acuity as advisors in this process because of their semiconductor expertise and strong network of industry contacts. Both proved essential in crafting the right selling messages, identifying the optimal partner and ultimately structuring a transaction which aligned all parties' interests. quote
Gerrit Schulte, Head of ZEISS Ventures and Daniel Ritter, Head of ZEISS M&A

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